Isivuno se-chip ekukhangelweni kwe-chip bekhiqiza i-chip sihlobene kakhulu nosayizi nenombolo yezinhlayiya zomoya ezifakwe ku-chip. Inhlangano enhle yokugeleza komoya ingathatha izinhlayiya ezikhiqizwe emithonjeni yothuli kude negumbi elihlanzekile futhi iqinisekise ukuhlanzeka kwegumbi lokuhlanza. Okusho ukuthi, inhlangano yokugeleza komoya ekuhlanzeni idlala indima ebalulekile ekuvuthweni kokukhiqizwa kwe-chip. Izinhloso okufanele zitholwe ekwakhiweni kwegumbi elihlanzekile le-Air Air Air Organisation yilezi: ukunciphisa noma ukuqeda imisinga e-Eddy enkombeni yokugeleza ukuze uvikele ukugcinwa kwezinhlayiya eziyingozi; ukugcina i-gradient efanelekile yokuvimbela ukungcoliswa kokunqamula.
Ngokusho komgomo wekamelo elihlanzekile, amabutho asebenza ngezinhlayiya afaka amandla amaningi, amandla amamolekyuli, ukuheha phakathi kwezinhlayiya, amandla okugeleza komoya, njll.
I-Airflow Force: ibhekisa kumandla we-airflow ebangelwa ukuhlinzekwa kanye nokubuyisa umoya, ukuguqulwa komoya, ukuguquguquka komoya, nezinye izimbali zokugeleza, nezinye izindiza ezinamazinga athile okugeleza ukuze uphathe izinhlayiya. Ukuze uthole ukulawulwa kobuchwepheshe bendawo yemvelo ehlanzekile, amandla okugeleza komoya kuyinto ebaluleke kakhulu.
Ukuhlolwa kukhombisile ukuthi ukunyakaza kwe-airflow, izinhlayiya zilandela i-airflow cishe ijubane elifanayo. Isimo sezinhlayiya emoyeni sinqunywa ukusatshalaliswa komoya. Imiphumela eyinhloko ye-Airflow ezincemeni zasendlini ifaka: Ukuhanjiswa komoya komoya (kufaka phakathi ukugeleza komoya okuyisisekelo kanye ne-airflow ye-airlow yesibili), nomthelela wokuhamba komoya okubangelwa abantu abasebenza ngemisebenzi yenqubo kanye nemishini yezimboni. Izindlela ezahlukahlukene zokuhlinzekwa komoya, izikhala ezisheshayo, opharetha kanye nemishini yezimboni, ama-phenomena, njll ezihlanjululweni kukhona zonke izinto ezithinta ukuhlanzeka kwezinga lokuhlanzeka.
1. Ithonya Lendlela Yokuhlinzekwa Komoya
(1) Isivinini sokuhlinzekwa komoya
Ukuze uqinisekise ukugeleza komoya okufanayo, isivinini sokuhlinzekwa komoya egumbini lokugeleza elingelona iqiniso kufanele lifane; Indawo efile esendaweni evulekile yomoya kumele ibe incane; Futhi ukwehla kwengcindezi ngaphakathi kwesihlungi se-hepa kumele futhi kube umfaniswano.
Ijubane lokuhlinzekwa komoya liyunifomu: okungukuthi, ukungalingani kokugeleza komoya kulawulwa ngaphakathi ± 20%.
Kunesikhala esincane esifile esimweni sokuhlinzekwa umoya
Ukuze uqinisekise ukuthi ukugeleza komoya kuqonde mpo futhi ungelona iqiniso, ukukhethwa kwethonya lokucindezela kwesihlungi kubaluleke kakhulu, futhi kuyadingeka ukuthi ukulahleka kwengcindezi ngaphakathi kwesihlungi akunakuba phakathi kokuhlunga akunakubandakanya.
(2) Ukuqhathanisa phakathi kohlelo lwe-FFU kanye nohlelo lokuhamba nge-axial flow
I-FFU iyiyunithi yokuhlinzekwa komoya nge-fan kanye ne-hepa. Umoya ungeniswe ngumlandeli we-centrifugal we-FFU futhi uguqula ingcindezi enamandla ibe ingcindezi ye-tuli ku-duct yomoya. Kushaywa ngaphandle ngokulinganayo ngesihlungi se-hepa. Ukucindezela komoya komoya ophahleni kuyingcindezi engemihle. Ngale ndlela akukho uthuli oluzovuza egumbini elihlanzekile lapho lifaka isihlungi. Ukuhlolwa kukhombisile ukuthi uhlelo lwe-FFU luphakeme kunohlelo lwe-axial flow fan mayelana ne-air air airlet, i-air flow parallelism kanye nenkomba yokusebenza komoya omncane. Lokhu kungenxa yokuthi ukugeleza komoya komoya kohlelo lwe-FFU kungcono. Ukusetshenziswa kohlelo lwe-FFU kungathuthukisa inhlangano yokugeleza komoya egumbini elihlanzekile.
(3) Ithonya lesakhiwo se-FFU uqobo
I-FFU ikakhulukazi yakhiwa abalandeli, izihlungi, izinkombandlela zokugeleza komoya nezinye izinto. Isihlungi se-HEPA yisiqinisekiso esibaluleke kakhulu segumbi elihlanzekile ukufezekisa ukuhlanzeka okudingekayo okudingwa yi-Design. Izinto zokuhlunga zizothinta nokufana kwensimu yokugeleza. Lapho okokuhlunga okunzima noma ipuleti yokugeleza kufakwa endaweni yokukhipha, insimu yokugeleza kwe-Outlet ingakhiwa kalula.
2. Umthelela wesibonisi sejubane ngokuhlanzeka okuhlukile
Ekamelweni elihlanzekile elihlanzekile, phakathi kokusebenza nendawo engasebenzi ngokugeleza okumi mpo, ngenxa yomehluko ngesivinini somoya ebhokisini le-HEPA, futhi lokhu kuxutshwa kuzoba yisiphithiphithi indawo ye-airflow. Ukuqina kwesiphithiphithi somoya kuqinile ikakhulukazi, futhi izinhlayiya zingadluliselwa ebusweni bomshini wezinto zokusebenza futhi zingcolise imishini nama-wafers.
3. Umthelela kubasebenzi kanye nemishini
Lapho igumbi elihlanzekile alinalutho, izici zokugeleza komoya egumbini zivame ukuhlangabezana nezidingo zokuklama. Uma imishini ingena e-Cleanroom, abantu bayahamba, futhi imikhiqizo iyathuthwa, kunezingqinamba ezingenakugwenywa enhlanganweni yokugeleza komoya, njengamaphoyinti abukhali aphuma emshinini wemishini. Emakhoneni noma emaphethelweni, igesi izophambukisa indawo yokugeleza kwesiyaluyalu, futhi uketshezi olusendaweni ngeke luthathwe kalula yigesi engenayo, ngaleyo ndlela kubangele ukungcoliswa.
Ngasikhathi sinye, ingaphezulu kwemishini yemishini lizofudunyezwa ngenxa yokusebenza okuqhubekayo, futhi i-laqurtarient yokushisa izodala indawo evuthayo eduze komshini, okukhulisa ukuqoqwa kwezinhlayiya endaweni ebonakalayo. Ngasikhathi sinye, izinga lokushisa eliphakeme lizokwenza izinhlayiya ziphunyuke. Umphumela we-Dual uqinisa ungqimba oluqondile oluqondile. Ubunzima bokulawula inhlanzeko yokusakaza. Uthuli oluvela kubasebenza egumbini elihlanzekile lungambelela kalula kuma-wafers kulezi zindawo.
4. Ithonya lokubuyisa phansi komoya
Lapho ukumelana komoya wokubuya kudlula phansi kuhlukile, umehluko wengcindezi uzovela, okwenza umoya ugeleze ohlangothini lokumelana okuncane, futhi ukugeleza komoya okufanayo ngeke kutholakale. Indlela yokwakheka ethandwayo yamanje ukusebenzisa phansi okuphakeme. Lapho isilinganiso sokuvula sephansi esiphakeme sise-10%, i-air flow velocity ingasatshalaliswa ngokulinganayo ekuphakameni kokusebenza kwendlu. Ngaphezu kwalokho, kufanele kubhekwe ngokuqinile ekuhlanzeni umsebenzi ukunciphisa umthombo wokungcola phansi.
5. Ukungeniswa kwento
Ukubizwa okubizwa ngokuthi yi-induction ntomenon kubhekisele emcimbini wokukhiqiza i-airflow ngakolunye uhlangothi ukugeleza okufanayo, okuvuthayo kukhiqizwa ezindaweni ezingcolile, lapho kukhiqizwa uthuli lokungcola. Kungenzeka ukuthi izinto ezibangelwa zifaka okulandelayo:
(1) Plate Plate
Endlini ehlanzekile ngokugeleza okuqondile kwendlela, ngenxa yamalunga odongeni, kunezimpawu ezinkulu ezimbalwa ezizokhiqiza ukugeleza okuyisiyaluyalu nokubuyela emuva kwasendaweni.
(2) izibani
Ukulungiswa kokukhanyisa egumbini elihlanzekile kuzoba nomthelela omkhulu. Njengoba ukushisa kwesibani se-fluorescent kubangela ukuba izibhamu zikhuphuke, isibani se-fluorescent ngeke sibe yindawo yesiyaluyalu. Ngokuvamile, amalambu egumbini elihlanzekile aklanyelwe ngesimo se-teardrop ukunciphisa umthelela wamalambu enhlanganweni ye-airflow.
(3) Izikhala phakathi kwezindonga
Lapho kunezikhala phakathi kwezindonga zokwahlukanisa noma ophahleni olunezidingo ezahlukahlukene zokuhlanzeka, uthuli oluvela ezindaweni ezinezidingo eziphansi zokuhlanzeka lungadluliselwa ezindaweni eziseduzane nezidingo eziphezulu zokuhlanzeka.
(4) ibanga phakathi kwemishini yemishini kanye phansi noma odongeni
Uma igebe phakathi kwemishini emishini kanye nephansi noma odongeni lincane, kuyavela isiphithiphithi esibuhlungu. Ngakho-ke, shiya igebe phakathi kwemishini nodonga bese ukhulisa ipulatifomu yomshini ukugwema ukuxhumana ngqo nomhlaba.
Isikhathi sePosi: Nov-02-2023