I-Cleanroom iyigumbi elinokuqukethwe okulawulwayo kwezinhlayiya ezimisiwe emoyeni. Ukwakhiwa nokusetshenziswa kwayo kufanele kunciphise ukwethulwa, ukukhiqizwa nokugcinwa kwezinhlayiya endlini. Eminye imingcele efanelekile efana nezinga lokushisa, umswakama nokucindezela ekamelweni kufanele ilawulwe njengoba kudingeka. Igumbi lokuhlanza lihlukaniswe ngenani lezinhlayiya zosayizi wezinhlayiyana ezithile ngeyunithi yomthamo womoya. Ihlukaniswe ngokusho kokugxila kwezinhlayiya ezimisiwe emoyeni. Ngokuvamile, inani elincane, izinga lokuhlanzeka liyakhuphuka. Okusho ukuthi, isigaba 10> isigaba 100> isigaba 10000> isigaba 100000.
Izinga legumbi lokuhlanza lekilasi le-100 libandakanya ikakhulukazi igumbi lokuhlinza, ukukhiqizwa kwe-aseptic embonini yezemithi.
Inombolo enkulu yezinhlayiya ezinosayizi wezinhlayiyana zokuhlanzeka ezinkulu noma ezilingana ne-micron engu-0.1 ayikwazi ukuba nkulu kuno-100.
Umehluko wokucindezela kanye nezinga lokushisa nomswakama wokushisa 22℃±2; umswakama 55%±5; ngokuyisisekelo, idinga ukumbozwa ngokugcwele nge-ffu futhi yenze izitezi eziphakeme. Yenza uhlelo lwe-MAU+FFU+DC. Futhi gcina ingcindezi enhle, futhi i-gradient yokucindezela yamagumbi aseduze iqinisekisiwe ukuthi izoba cishe ku-10pa.
Ukukhanyisa Njengoba izinto eziningi eziqukethwe emakamelweni ahlanzekile angenalo izintuli zinezidingo ezinhle futhi zonke ziyizindlu ezivaliwe, bekulokhu kunezidingo eziphezulu zokukhanyisa. Ukukhanyisa kwendawo: Lokhu kubhekisela ekukhanyeni okusethelwe ukwandisa ukukhanya kwendawo ekhethiwe. Nokho, izibani zendawo ngokuvamile azisetshenziswa zodwa ekukhanyisweni kwangaphakathi. Ukukhanyisa okuxubile: Kubhekisela ekukhanyisweni kwendawo yokusebenza ehlanganiswa ukukhanya okukodwa nokukhanyisa kwendawo, lapho ukukhanya kokukhanya okuvamile kufanele kubangele u-10% -15% wokukhanya okuphelele.
Izinga lekilasi le-1000 lokuhlanza liwukulawula inani lezinhlayiya zothuli ezinosayizi wezinhlayiyana ezingaphansi kuka-0.5 microns cubic meter ngayinye ukuya ngaphansi kwezi-3,500, ezifinyelela ezingeni lamazwe ngamazwe elingenalo uthuli. Izinga elingenalo uthuli okwamanje elisetshenziswa ekukhiqizweni nasekucutshungulweni kwezinga le-chip linezidingo zothuli eziphakeme kunesigaba A. Amazinga aphezulu anjalo asetshenziswa kakhulu ekukhiqizweni kwamanye ama-chips ezinga eliphezulu. Inani lezinhlayiya zothuli lilawulwa ngokuqinile ngaphakathi kwe-1,000 cubic meter ngayinye, eyaziwa ngokuthi i-class 1000 embonini ye-cleanroom.
Kumaworkshop amaningi ahlanzekile angenalo uthuli, ukuze kuvinjwe ukungcola kwangaphandle ukuthi kungangeni, kuyadingeka ukugcina ingcindezi yangaphakathi (i-static pressure) iphakeme kunengcindezi yangaphandle (i-static pressure). Ukugcinwa komehluko wengcindezi ngokuvamile kufanele kuhambisane nezimiso ezilandelayo: ukucindezela kwendawo ehlanzekile kufanele kube phezulu kunendawo engahlanzekile; ingcindezi yendawo enezinga eliphezulu lokuhlanzeka kufanele ibe phezulu kunesikhala esiseduze nezinga lokuhlanzeka eliphansi; iminyango phakathi kwamakamelo ahlanzekile axhunyiwe kufanele ivulwe emakamelweni anezinga eliphezulu lokuhlanzeka. Ukugcinwa komehluko wengcindezi kuncike enanini lomoya omusha, okufanele ukwazi ukunxephezela inani lomoya ovuzayo ezikhaleni ngaphansi kwalo mehluko wengcindezi. Ngakho-ke, incazelo engokomzimba yomehluko wengcindezi ukumelana nokuvuza (noma ukungena) ivolumu yomoya lapho idlula izikhala ezihlukahlukene ekamelweni elihlanzekile.
Igumbi lokuhlanza le-Class 10000 lisho inani lezinhlayiya zothuli ezinkulu noma elilingana no-0.5um likhulu kunezinhlayiya ezingu-35,000/m3 (izinhlayiya ezingu-35/) kuya ngaphansi noma kulingana nezingu-35,000/m3 (izinhlayiya ezingu-350/) kanye nenani lezinhlayiya zothuli ezinkulu noma ezilingana nezinhlayiyana ezingu-300/300 (izinhlayiya ezingu-300) kuya ngaphansi noma okulingana nezinhlayiya ezingu-3,000/m3 (izinhlayiya ezi-3). Umehluko wengcindezi nokulawula izinga lokushisa nomswakama.
Ukulawula izinga lokushisa kanye nokuswakama kwesistimu yekhoyili eyomile. Ibhokisi le-air conditioning lilungisa umthamo wamanzi wekhoyili yebhokisi le-air conditioning ngokulawula ukuvulwa kwe-valve yezindlela ezintathu ngokusebenzisa isignali yenzwa.
Igumbi lokuhlanza le-Class 100000 lisho ukuthi izinhlayiya nge-cubic meter ngayinye endaweni yokusebenzela zilawulwa ngaphakathi kwe-100,000. Indawo yokusebenzela yokukhiqiza yegumbi elihlanzekile isetshenziswa kakhulu embonini ye-elekthronikhi nasembonini yezemithi. Kuhle impela ukuthi imboni yezokudla ibe nenkundla yokucobelelana ngolwazi yokukhiqiza eyi-100,000. Igumbi lokuhlanza lekilasi le-100,000 lidinga izinguquko zomoya eziyi-15-19 ngehora, Ngemuva kokungena komoya ogcwele, isikhathi sokuhlanza umoya ngeke sidlule imizuzu engama-40.
Umehluko wengcindezi wamagumbi ahlanzekile anezinga lokuhlanzeka elifanayo kufanele ugcinwe ulingana. Umehluko wengcindezi phakathi kwamagumbi ahlanzekile aseduze anamazinga ahlukene okuhlanzeka kuzoba ngu-5Pa, futhi umehluko wengcindezi phakathi kwamagumbi ahlanzekile namagumbi angahlanzekile uzoba > 10pa.
Izinga lokushisa kanye nomswakama Uma zingekho izidingo ezikhethekile zokushisa nomswakama egumbini elihlanzekile le-100,000, kuhle ukugqoka izingubo zokusebenza ezihlanzekile ngaphandle kokuzizwa ungakhululekile. Izinga lokushisa livamise ukulawulwa ku-20~22℃ ebusika kanye no-24~26℃ ehlobo, ngokuguquguquka okungu-±2C. Umswakama wamakamelo ahlanzekile ebusika ulawulwa ku-30-50% futhi umswakama wamagumbi ahlanzekile ehlobo ulawulwa ku-50-70%. Inani lokukhanyisa lamagumbi okukhiqiza ayinhloko emakamelweni ahlanzekile (izindawo) kufanele ngokuvamile libe >300Lx: inani lokukhanyisa lezitudiyo ezisizayo, ukuhlanzwa kwabasebenzi kanye namakamelo okuhlanza impahla, amagumbi omoya, amaphasishi, njll. kufanele kube ngu-200~300L.
Isikhathi sokuthumela: Apr-14-2025